FlexiFabM O D U L E S
[ Positive Develop ] [ Coat ] [ Vacuum Bake ] [ Vacupryme ] [ Hot Plate ] [ Chill Plate ] [ Elevator ] [ Buffer ]
76mm to 200mm wafers
Central to the develop module's
process capabilities, the FlexiFab spin motor is designed to provide range, reliability, and control.
Spin Speed Range: 10-10,000 rpm (in 10 rpm increments)
Spin Speed Control: ±1rpm (from 0-1000 rpm); ±0.1% rpm; (from 1,000-10,000 rpm)