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FlexiFab
M O D U L E S

[ Positive Develop ] [ Coat ] [ Vacuum Bake ] [ Vacupryme ] [ Hot Plate ] [ Chill Plate ] [ Elevator ] [ Buffer ]



76mm to 200mm wafers

 

SYSTEM SPECIFICATIONS

 

Spin Motor

Central to the develop module's process capabilities, the FlexiFab spin motor is designed to provide range, reliability, and  control.

Spin Speed Range: 10-10,000 rpm (in 10 rpm increments)

Spin Speed Control: 1rpm (from 0-1000 rpm); 0.1% rpm; (from 1,000-10,000 rpm)