We are committed to providing innovative, reliable, and cost effective manufacturing
equipment for semiconductor manufacturing. A series of semiautomatic systems for your R&D and multiple choices of cassette to cassette systems for your production.
We provide new and Refurbished Solitec, MTI, GCA, and OptiTrac semiconductor
With decades of spin technology background, we are sure to find a solution for any
We are committed to prompt professional service whether your requirements are for a
single spare part or a complete system. Our customer base serves over 1000 world wide customers, including some of the largest semiconductor manufacturing companies in the world as well as many
Universities and R&D Centers. We will continue to invest in product development to improve our product both in technology and productivity.
Technologies and Processes:
Coating – Positive, Negative,
Polyimide, Polymers, adhesives, etc.
If you want to spin process your coating material, we'll help you find a way.
– Flat fan spray, puddle, Atomized-aspiration and Ultrasonic
Solvent Develop – Atomized-Aspirated
Cleaning – High pressure Jet spray &/or brush scrub
Bake – Cassette to cassette and Stand Alone. Ambient to 450
Chill (cooling) plates. Water jacket and thermoelectric junction devices.
HMDS Vapor Prime: Stand alone and in-line cassette to cassette systems.
NH3 Image Reversal - Stand alone and in-line cassette to cassette systems.
UV in line Cure
for image reversal. Flood exposure of wafer at >200mJ/cm2 .
Metal Lift-off – Semi-automatic and cassette to cassette.
Horizontal Quartz Cleaners for cleaning Horizontal tubes, horizontally.
Vertical Quartz Cleaners for cleaning Horizontal tubes, vertically.
Vertical Quartz Tube Cleaners
Quartz Bell Jar cleaners
All specifications, features, services and products
are subject to change at anytime.